Details
Title
Characterization of the ionization process inside a miniature glow-discharge micropumpJournal title
Bulletin of the Polish Academy of Sciences: Technical SciencesYearbook
2018Volume
66Numer
No 2Authors
Keywords
ion-sorption micropump ; MEMS-type micropump ; gas discharge ; ionizationDivisions of PAS
Nauki TechniczneCoverage
173-178Date
2018.04.30DOI
10.24425/122097