Details

Title

Temperature Effect on the Growth Rate and Physical Characteristics of SnO2 Thin Films Grown by Atomic Layer Deposition

Journal title

Archives of Metallurgy and Materials

Yearbook

2018

Volume

vol. 63

Numer

No 2

Authors

Keywords

atomic layer deposition ; tin oxide ; growth rate ; film density ; optical band gap

Divisions of PAS

Nauki Techniczne

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Commitee on Metallurgy of Polish Academy of Sciences

Date

2018.06.30

Type

Artykuły / Articles

Identifier

ISSN 1733-3490

DOI

10.24425/122443

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