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Abstract

In this work, the influence of both characteristics of the lens and misalignment of the incident beams on roughness measurement is presented. To investigate how the focal length and diameter affect the degree of correlation between the speckle patterns, a set of experiments with different lenses is performed. On the other hand, the roughness when the beams separated by an amount are non-coincident at the same point on the sample is measured. To conclude the study, the uncertainty of the method is calculated.
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Abstract

This work is focused on the issue of non-measured points – one of the most important problems in surface texture measurements using optical methods. The fundamental aim of this research is to analyse errors of surface texture measurements caused by the presence of non-measured points. This study is divided into two parts. In the first part, circles with non-measured points were artificially created on peak portions of measured surfaces. In the second part – the results of measurement by a Talysurf CCI Lite interferometer were analysed. A measurement area of 3.3 × 3.3 mm contained 1024 × 1024 points. The measurements were performed with different intensity of light. Changes of parameters regarding the analysed errors depended on a surface type. The following parameters are susceptible to errors: skewness Ssk, areal material ratio Smr, as well as the following feature parameters: Spd, Sda, Sdv, Sha and Shv. Inaccuracies of measurement in valley parts of two-process textures led usually to larger errors of parameter computations compared with deviations in peak portions.
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