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This study proposes a surface profile and roughness measurement system for a fibre-optic interconnect based on optical interferometry. On the principle of Fizeau interferometer, an interference fringe is formed on the fibre end-face of the fibre-optic interconnect, and the fringe pattern is analysed using the Fast Fourier transform method to reconstruct the surface profile. However, as the obtained surface profile contains some amount of tilt, a rule for estimating this tilt value is developed in this paper. The actual fibre end-face surface profile is obtained by subtracting the estimated tilt amount from the surface profile, as calculated by the Fast Fourier transform method, and the corresponding surface roughness can be determined. The proposed system is characterized by non-contact measurement, and the sample is not coated with a reflector during measurement. According to the experimental results, the difference between the roughness measurement result of an Atomic Force Microscope (AFM) and the measurement result of this system is less than 3 nm.
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