In this study, precisely controlled large scale gas atomization process was applied to produce spherical and uniform shaped high entropy alloy powder. The gas atomization process was carried out to fabricate CoCrFeNiMn alloy, which was studied for high ductility and mechanical properties at low temperatures. It was confirmed that the mass scale, single phase, equiatomic, and high purity spherical high entropy alloy powder was produced by gas atomization process. The powder was sintered by spark plasma sintering process with various sintering conditions, and mechanical properties were characterized. Through this research, we have developed a mass production process of high quality and spherical high entropy alloy powder, and it is expected to expand applications of this high entropy alloy into fields such as powder injection molding and 3D printing for complex shaped components.